A MEMS platform for 2-D fine-positioning and locking of optical ball-lens in silicon photonics packaging

Author

Zhang, Q.X. ; Du, Y. ; Tan, C.W. ; Zhang, J. ; Yu, M.B. ; Lo, G.Q. ; Kwong, D.L.

Author_Institution

Inst. of Microelectron., A*STAR (Agency for Sci., Technol. & Res.), Singapore, Singapore

fYear

2010

fDate

14-16 Dec. 2010

Firstpage

1

Lastpage

5

Abstract

This paper reports a novel silicon platform with integrated MEMS actuators, which is used for fine-positioning and locking of a ball-lens, to address the optical coupling issues in silicon photonics packaging. The fine-positioning and locking function of the ball-lens have been successfully demonstrated by the developed prototype silicon platform. The main adjusting actuator delivered a large force making the suspension arm moved for 50μm in-plane under the driving voltage of 30V. The displacement resolution is less than 0.1μm within working range of 25+/-5μm. Besides, mechanical locking of the suspension arm by micro-lockers has been achieved and the shift between the locked structures is less than 0.1μm after a vibration test at 2 kHz, 10g. Finally, active alignment of a ball lens in a LD/Si-waveguide optical coupling system is experimentally demonstrated by using the prototype silicon platform.

Keywords

actuators; dynamic testing; electronics packaging; integrated optics; lenses; micro-optomechanical devices; optical couplers; optical waveguides; silicon; 2D fine-positioning; LD-Si-waveguide; Si; displacement resolution; frequency 2 kHz; integrated MEMS actuators; mechanical locking; microlockers; optical ball-lens; optical coupling; silicon photonics packaging; suspension arm; vibration test; voltage 30 V; Actuators; Lenses; Micromechanical devices; Optical waveguides; Photonics; Silicon; Suspensions;

fLanguage

English

Publisher

ieee

Conference_Titel

Photonics Global Conference (PGC), 2010

Conference_Location

Singapore

Print_ISBN

978-1-4244-9882-6

Type

conf

DOI

10.1109/PGC.2010.5705982

Filename

5705982