Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S_eff, increases continuously from 5 mum to 10.5 mum. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).