Advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator

Author

Al-Ahmad, M. ; Loyez, C. ; Rolland, N. ; Plana, R. ; Rolland, P.A.

fYear

2007

fDate

9-12 Oct. 2007

Firstpage

118

Lastpage

121

Abstract

In this work, The mechanical movements of a piezoelectric actuator is used to change the capacitance values of an air-gap capacitor. With a bias voltage up to 200 V the effective air gap size, S_eff, increases continuously from 5 mum to 10.5 mum. Due to that the coupling capacitance is tuned from 0.22 pF to 0.1 pF, i.e. tuning ratio of 2.2. When employing in hybrid packaged tunable voltage-controlled oscillator, its oscillation frequency is tuned from 34.40 GHz to 36 GHz, tuning of 5% (absolute bandwidth tuning of 1.6 GHz).

Keywords

microstrip resonators; piezoelectric actuators; piezoelectric oscillations; voltage-controlled oscillators; advanced hybrid packaged piezoelectric actuated MEMS-based tunable voltage controlled oscillator; microstrip resonators; negative resistance circuits; piezoelectric material; varactors; Air gaps; Bandwidth; Capacitance; Capacitors; Frequency; Packaging; Piezoelectric actuators; Tuning; Voltage; Voltage-controlled oscillators; Negative resistance circuits; microelectromechanical devices; microstrip resonators; oscillator; piezoelectric material; tunable devices and circuits; tuning; varactors; voltage controlled oscillator;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. European

Conference_Location

Munich

Print_ISBN

978-2-87487-001-9

Type

conf

DOI

10.1109/EUMC.2007.4405140

Filename

4405140