Title :
Hybrid integration of light emitting diodes with photonic integrated circuits on silicon
Author :
Cristea, Dana ; Modreanu, M. ; Caldararu, M. ; Cernica, H. ; Avramescu, V.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
This paper presents the experiments we performed for hybrid integration of LEDs with silicon photonic integration circuits. LEDs were face down mounted in a silicon cavity. The edge-emitted light is coupled in SiON waveguides. The silicon cavity was obtained by anisotropic etching of the silicon substrate. The integration of all the components on one chip increases the sensor reliability and reduces the size, weight and cost
Keywords :
elemental semiconductors; integrated optics; light emitting diodes; silicon; Si; SiON waveguide; anisotropic etching; hybrid integration; light emitting diode; photonic integrated circuit; sensor reliability; silicon cavity; Coupling circuits; Etching; Integrated circuit technology; Integrated optics; Light emitting diodes; Optical coupling; Optical sensors; Optical waveguides; Photonic integrated circuits; Silicon;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.733803
