DocumentCode
2405410
Title
A novel method for PZT thin film piezoelectric coefficients determination using conventional impedance analyzer
Author
Al-Ahmad, Mahmoud ; Plana, Robert
Author_Institution
LAAS-CNRS, Toulouse
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
202
Lastpage
205
Abstract
In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d33, which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.
Keywords
geometry; micrometry; network analysers; piezoelectric thin films; PZT thin film; arbitrary sample geometry; impedance analyzer; micrometer; nanometer; network analyzer; piezoelectric coefficients determination; Displacement measurement; Impedance; Micromechanical devices; Microwave measurements; Optical resonators; Piezoelectric films; Piezoelectric materials; Resonance; Thickness measurement; Voltage; MEMS; Piezoelectric material; material characterization; microwave measurements;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405161
Filename
4405161
Link To Document