Title :
A novel method for PZT thin film piezoelectric coefficients determination using conventional impedance analyzer
Author :
Al-Ahmad, Mahmoud ; Plana, Robert
Author_Institution :
LAAS-CNRS, Toulouse
Abstract :
In this work, novel and simple method is described for the determination of the thin-film piezoelectric coefficient d33, which utilizes the conventional impedance or network analyzer. The technique avoids complicated preparation and uses arbitrary sample geometry. It may be used to determine the piezoelectric coefficient for films having a thickness ranges from several nanometers up to around several hundreds micrometers. The predicted values for the piezoelectric coefficient are found to be close to those that have been determined by more elaborated methods.
Keywords :
geometry; micrometry; network analysers; piezoelectric thin films; PZT thin film; arbitrary sample geometry; impedance analyzer; micrometer; nanometer; network analyzer; piezoelectric coefficients determination; Displacement measurement; Impedance; Micromechanical devices; Microwave measurements; Optical resonators; Piezoelectric films; Piezoelectric materials; Resonance; Thickness measurement; Voltage; MEMS; Piezoelectric material; material characterization; microwave measurements;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405161
