Contactless network analysis system for the calibrated measurement of the scattering parameters of planar two-port devices

In this paper a system for the contactless measurement of the scattering parameters of planar two-port devices is presented. Thereby, loop couplers are used as probes. The system is calibrated with the Thru-Reflect-Line calibration algorithm regarding planar reference planes. This provides the possibility to measure scattering parameters of devices embedded in complex planar circuits. The contactless measured scattering parameters of different devices are compared with results received by a conventional vector network analyzer. This comparison shows that the results are corresponding to each other. Furthermore, it is shown, that a contactless measurement of an embedded DUT is possible.