Title :
Air bridges and planar inductors for MMICs
Author :
Vasilache, D. ; Iordanescu, S. ; Avramescu, V. ; Petrini, Ioana ; Rizescu, R. ; Müller, A.
Author_Institution :
Nat. Inst. for Res. & Dev. in Microtechnol., Bucharest, Romania
Abstract :
The aim of this paper is to present the technology for air-bridges manufacturing, as MMIC dedicated interconnection elements. This technology offers low parasitic interconnect capacitance and inductance. The manufacturing of square loop inductors is presented too
Keywords :
MMIC; inductors; integrated circuit interconnections; MMIC interconnection; air bridge; manufacturing technology; parasitic capacitance; parasitic inductance; planar inductor; square loop inductor; Bridge circuits; Dielectric constant; Dielectric substrates; Inductors; Integrated circuit interconnections; Integrated circuit technology; MMICs; Manufacturing; Millimeter wave technology; Resists;
Conference_Titel :
Semiconductor Conference, 1998. CAS '98 Proceedings. 1998 International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-4432-4
DOI :
10.1109/SMICND.1998.733823
