Title :
Modelling of tuneable acoustic resonators based on BSTO films with induced piezoelectric effect
Author :
Turalchuk, Pavel ; Vendik, Irina ; Vendik, Orest ; Berge, John
Author_Institution :
St. Petersburg Electrotech. Univ., St .Petersburg
Abstract :
A reliable model of a tuneable bulk acoustic resonator based on BSTO film with induced piezoelectric effect is proposed. The estimation of resonance and antiresonance frequency shift of bulk acoustic resonator as a function of the applied voltage has been carried out. The results of the input impedance modelling of the BSTO bulk acoustic resonator are in agreement with the experimental data.
Keywords :
acoustic resonators; dielectric resonators; dielectric thin films; piezoelectricity; BSTO films; antiresonance frequency shift; induced piezoelectric effect; input impedance modelling; tuneable bulk acoustic resonator; Electrostriction; Ferroelectric materials; Film bulk acoustic resonators; Impedance; Microwave devices; Nonlinear equations; Piezoelectric effect; Piezoelectric films; Piezoelectric materials; Tensile stress;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405181
