• DocumentCode
    2406273
  • Title

    Novel SOI-like structures for improved thermal dissipation

  • Author

    Oshima, K. ; Cristoloveanu, S. ; Guillaumot, B. ; Carval, G.L. ; Deleonibus, S. ; Iwai, H. ; Mazure, C. ; Park, K.H.

  • Author_Institution
    CEA LETI/DTS/SRD, Grenoble, France
  • fYear
    2002
  • fDate
    7-10 Oct 2002
  • Firstpage
    95
  • Lastpage
    96
  • Abstract
    An SOI-like structure with adequate buried insulator replacing the BOX is extremely attractive for improved thermal dissipation. The resulting material is still SOI-like: thin Si film, high-k dielectric, Si substrate, and can be synthesized by adapting the current bonding techniques. The argument in favor of high-k dielectrics is that they will be used as gate insulators anyway, and high-k technology is being optimized; the whole process is simplified by considering ´symmetrical´ oxides. The approach is illustrated with a simple thermal mode, which is validated by self-consistent 2D numerical simulations.
  • Keywords
    MOSFET; alumina; buried layers; cooling; digital simulation; semiconductor device models; silicon-on-insulator; Al2O3; SOI-like structures; Si; Si substrate; Si thin film; buried insulator; high-k dielectric; improved thermal dissipation; self-consistent 2D numerical simulations; symmetrical oxides; thermal mode; Aluminum compounds; Cooling; MOSFETs; Semiconductor device modeling; Silicon on insulator technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, IEEE International 2002
  • Print_ISBN
    0-7803-7439-8
  • Type

    conf

  • DOI
    10.1109/SOI.2002.1044432
  • Filename
    1044432