Title :
RF-Powder : Fabrication of 0.15-mm Si-powder resonating at microwave frequencies
Author :
Mura, Naomi ; Furumura, Yuji ; Fujino, Katsuhiro ; Nishihara, Shinji ; Kamihashi, Susumu ; Mishima, Katsuhiko
Author_Institution :
Philtech Inc., Tokyo
Abstract :
Resonant circuits (LC tank circuit) were formed on 150 mum-square silicon chips, which are consisted of a small spiral inductor and an MIM capacitor. The small inductor was fabricated by an X-ray lithography and Cu plating. Resonant characteristics in 2.5 GHz band were measured using a helical coil probe. Obtained resonant frequency and unload Q showed good agreement with designed and simulated ones. Miniaturization to a 150 mum-chip showed a variety of probable applications on a sheet such as a paper.
Keywords :
CMOS integrated circuits; Q-factor; X-ray lithography; inductors; silicon; LC tank circuit; MIM capacitor; X-ray lithography; copper plating; resonant circuits; silicon powder; spiral inductor; Fabrication; Inductors; MIM capacitors; Microwave frequencies; RLC circuits; Resonance; Semiconductor device measurement; Silicon; Spirals; X-ray lithography; CMOS integrated circuits; Electromagnetic coupling; Inductance; Microwave technology; Q factor; RFID; Resonance;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405209
