Title :
3D mode converters for SOI integrated optics
Author :
Fritze, M. ; Knecht, J. ; Bozler, C. ; Keast, C. ; Fijol, J. ; Jacobson, S. ; Keating, P. ; LeBlanc, J. ; Fike, E. ; Kessler, B. ; Frish, M. ; Manolatou, C.
Author_Institution :
Lincoln Lab., MIT, Lexington, MA, USA
Abstract :
This paper reports on the development of a new mode converter technology for the growing SOI integrated optics field. Mode converters were designed and fabricated to permit efficient coupling of typical 10-μm diameter optical fiber modes to single mode SOI waveguide structures as small as 0.25 μm. A three-dimensional adiabatic taper approach was employed based on graytone lithography. This device is an important enabler for practical subwavelength SOI-waveguide integrated optics technology.
Keywords :
integrated optoelectronics; optical fibres; optical waveguides; silicon-on-insulator; 0.25 micron; 10 micron; 3D mode converter; SOI integrated optics; Si-SiO; graytone lithography; optical fiber modes; single mode SOI waveguide structures; three-dimensional adiabatic taper approach; Integrated optoelectronics; Optical fibers; Optical waveguides; Silicon on insulator technology;
Conference_Titel :
SOI Conference, IEEE International 2002
Print_ISBN :
0-7803-7439-8
DOI :
10.1109/SOI.2002.1044461
