Coplanar waveguides in silicon with low attenuation and slow wave reduction

Author

Amaya, Rony E. ; Li, Ming ; Harrison, Robert G. ; Tarr, N. Garry

Author_Institution

Commun. Res. Centre, Ottawa

fYear

2007

fDate

9-12 Oct. 2007

Firstpage

508

Lastpage

511

Abstract

This paper presents coplanar waveguide structures with low attenuation and slow-wave reduction implemented in standard silicon technologies and suitable for frequencies of up to 40 GHz. Optimization and modelling of slow-wave coplanar waveguides (SW-CPW) is provided here and compared to standard CPW models. An on-chip SW-CPW attenuation of 0.25 dB/mm at 40 GHz is obtained, compared with 2.8 dB/mm for a standard CPW. As an application, a non-linear transmission line (NLTL) was designed using SW-CPW sections. This NLTL can sharpen the pulse rise time by 75%. This work demonstrates the feasibility and advantage of using SW-CPW techniques to build all-silicon pulse-compression NLTLs using commercial silicon foundry processes.

Keywords

CMOS integrated circuits; circuit optimisation; coplanar transmission lines; coplanar waveguides; elemental semiconductors; field effect MIMIC; integrated circuit design; integrated circuit modelling; millimetre wave devices; pulse compression; silicon; slow wave structures; CMOS process; Si; all-silicon pulse-compression NLTL; frequency 40 GHz; low attenuation coplanar waveguides structures; nonlinear transmission line design; on-chip SW-CPW attenuation; pulse rise time; slow-wave coplanar waveguides modelling; standard silicon technologies; Attenuation; CMOS technology; Conductors; Coplanar waveguides; Equations; MMICs; Microstrip; Silicon; Substrates; Transmission lines; CMOS; CPW; NLTL; non-linear transmission line; slow-wave CPW;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2007. European

Conference_Location

Munich

Print_ISBN

978-2-87487-001-9

Type

conf

DOI

10.1109/EUMC.2007.4405239

Filename

4405239