Title :
Assembly and characterization of optical MEMS (micro-electro-mechanical systems)
Author :
Khalil, Diaa ; Morshed, Ahmed H.
Author_Institution :
Fac. of Eng., Ain Shams Univ., Cairo, Egypt
Abstract :
In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachining (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and misalignment loss measurements are developed
Keywords :
etching; micro-optics; microassembling; micromachining; optical fabrication; optical loss measurement; optical testing; oxidation; packaging; photolithography; MOEMS device; V grooves; automated set-up; components assembly; free space optical fiber connection; knife-edge technique; micromachining; misalignment loss measurements; optical MEMS; oxidation; packaging; photolithography; silicon substrate; spot size; wet etching; Assembly; Glass; Lithography; Loss measurement; Micromachining; Micromechanical devices; Optical devices; Optical losses; Oxidation; Wet etching;
Conference_Titel :
Photonics and Its Application at Egyptian Engineering Faculties and Institutes, 2002. Third Workshop on
Conference_Location :
Giza
Print_ISBN :
0-7803-7163-1
DOI :
10.1109/PAIA.2002.995083
