Title :
2006 IEEE Workshop on Microelectronics and Electron Devices (IEEE Cat. No. 06EX1374C)
Abstract :
The following topics are dealt with: circuit design; MEMS; semiconductor devices; sensors; advanced processing and reliability
Keywords :
integrated circuit design; integrated circuit technology; micromechanical devices; microsensors; semiconductor devices; semiconductor technology; MEMS; advanced processing; circuit design; microelectronics; reliability; semiconductor devices; sensors;
Conference_Titel :
Microelectronics and Electron Devices, 2006. WMED '06. 2006 IEEE Workshop on
Conference_Location :
Boise, ID
Print_ISBN :
1-4244-0374-X
DOI :
10.1109/WMED.2006.1678269
