DocumentCode

2408254

Title

Session - MEMS, Devices, and Sensors

fYear

2006

fDate

38821

Firstpage

13

Lastpage

13

Keywords

Micromechanical devices;

fLanguage

English

Publisher

ieee

Conference_Titel

Microelectronics and Electron Devices, 2006. WMED '06. 2006 IEEE Workshop on

Print_ISBN

1-4244-0374-X

Type

conf

DOI

10.1109/WMED.2006.1678283

Filename

1678283