DocumentCode
2408923
Title
Analytic modeling of monolithic inductors on semiconductor substrates
Author
Yoo, Seung-Jin ; Friar, Rob ; Neikrik, D.P.
Author_Institution
Dept. of Electr. & Comput. Eng., Texas Univ., Austin, TX, USA
fYear
1998
fDate
26-28 Oct 1998
Firstpage
219
Lastpage
222
Abstract
For inductors on silicon substrates, a simple predictive model is presented which explicitly accounts for substrate resistivity. Model and experimental results are in excellent agreement over a wide range of geometries, semiconductor resistivities, and frequency
Keywords
MIS devices; electrical resistivity; inductors; semiconductor device measurement; semiconductor device models; MIS inductors; Si; analytic modeling; inductor geometry; inductors; monolithic inductors; operating frequency; predictive model; semiconductor resistivity; semiconductor substrates; silicon substrates; substrate resistivity; Conductivity; Dielectric substrates; Frequency; Geometry; Inductance; Inductors; Microstrip; Predictive models; Silicon; Solid modeling;
fLanguage
English
Publisher
ieee
Conference_Titel
Electrical Performance of Electronic Packaging, 1998. IEEE 7th Topical Meeting on
Conference_Location
West Point, NY
Print_ISBN
0-7803-4965-2
Type
conf
DOI
10.1109/EPEP.1998.733989
Filename
733989
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