Title :
Analytic modeling of monolithic inductors on semiconductor substrates
Author :
Yoo, Seung-Jin ; Friar, Rob ; Neikrik, D.P.
Author_Institution :
Dept. of Electr. & Comput. Eng., Texas Univ., Austin, TX, USA
Abstract :
For inductors on silicon substrates, a simple predictive model is presented which explicitly accounts for substrate resistivity. Model and experimental results are in excellent agreement over a wide range of geometries, semiconductor resistivities, and frequency
Keywords :
MIS devices; electrical resistivity; inductors; semiconductor device measurement; semiconductor device models; MIS inductors; Si; analytic modeling; inductor geometry; inductors; monolithic inductors; operating frequency; predictive model; semiconductor resistivity; semiconductor substrates; silicon substrates; substrate resistivity; Conductivity; Dielectric substrates; Frequency; Geometry; Inductance; Inductors; Microstrip; Predictive models; Silicon; Solid modeling;
Conference_Titel :
Electrical Performance of Electronic Packaging, 1998. IEEE 7th Topical Meeting on
Conference_Location :
West Point, NY
Print_ISBN :
0-7803-4965-2
DOI :
10.1109/EPEP.1998.733989
