Stress distribution of thin circular quartz qafer and force sensitive characteristic experiments of resonator

An ANSYS analysis and computation of the stress distribution in circular AT cut quartz wafer was carried out, when quartz wafer was subjected to a force along its diameter which was parallel to the x axis, the force-frequency coefficient of quartz resonator were tested by using plated electrode on different region. Experiment proves that the result of ANSYS analysis is nearly consistent with experiment, and the maximum error is 0.36%. Therefore, when a resonator is designed on the same circular quartz, by using the finite element method, electrode may be set at the limited scope to choose positions of the notable force-frequency coefficient according to the stress distribution of the wafer. The integrated quartz resonator of the prominent force-frequency coefficient can be obtained.