Title :
Effect of Refractive Solid Immersion Lens parameters on the enhancement of laser induced fault localization techniques
Author :
Goh, Sh ; Quah, Act ; Sheppard, Cjr ; Chua, Cm ; Koh, Ls ; Phang, JCH
Author_Institution :
Centre for Integrated Circuit Failure Anal. & Reliability, Nat. Univ. of Singapore, Singapore
Abstract :
The effect of refractive solid immersion lens (RSIL) parameters on the enhancement to laser induced fault localization techniques are investigated. The experimental results of the effect on a common laser induced technique, namely thermally induced voltage alteration (TIVA), and imaging are presented. A signal enhancement in the peak TIVA signal of close to 12 times has been achieved.
Keywords :
fault location; integrated circuit testing; laser beam applications; lenses; monolithic integrated circuits; image processing; laser induced fault localization; refractive solid immersion lens; signal enhancement; thermally induced voltage alteration; Apertures; Circuit faults; Focusing; Lenses; Optical imaging; Optical refraction; Semiconductor lasers; Silicon; Solid lasers; Substrates;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2039-1
Electronic_ISBN :
978-1-4244-2040-7
DOI :
10.1109/IPFA.2008.4588146
