Title :
Time resolved determination of electrical field distributions within dynamically biased power devices by spectral EBIC investigations
Author :
Pugatschow, A. ; Heiderhoff, R. ; Balk, L.J.
Author_Institution :
Dept. of Electron., Wuppertal Univ., Wuppertal
Abstract :
Time resolved quantitative E-field analyses in near-surface regions of dynamically biased power devices can be performed stroboscopically by spectral EBIC investigations. Incorporating filtering and signal separation in time and frequency domains as well as averaging recovery techniques enhance signal to noise ratios and reduce disturbing signals up to 160 dB.
Keywords :
EBIC; electric field measurement; power semiconductor devices; semiconductor device testing; stroboscopes; E-field measurement; averaging recovery techniques; biased power devices; electrical field distribution; filtering method; signal separation; spectral EBIC investigation; stroboscopy; time resolved determination; Breakdown voltage; Charge carriers; Current density; Electron beams; Equations; Frequency domain analysis; Pulse measurements; Signal resolution; Steady-state; Time measurement;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
Conference_Location :
Singapore
Print_ISBN :
978-1-4244-2039-1
Electronic_ISBN :
978-1-4244-2040-7
DOI :
10.1109/IPFA.2008.4588150
