Title :
Hybrid integrated micromachined receiver for 77 GHz millimeter wave identification systems
Author :
Müller, A. ; Neculoiu, D. ; Pursula, P. ; Vaha-Heikkila, T. ; Giacomozzi, F. ; Tuovinen, J.
Author_Institution :
IMT-Bucharest, Bucharest
Abstract :
This paper presents the design, fabrication and millimeter wave measurements of a w-band (75-110 GHz) hybrid integrated micromachined receiver, an integrated double-folded slot antenna has been manufactured using silicon micromachining techniques. The receiver includes a flip chipped diode, which is used as a detector and modulator to demonstrate a millimeter wave identification (MMID) system, the experimental 77 GHz results show, that backscattering based communication used in radio frequency identification (RFID) is feasible also in the millimeter wave frequency range.
Keywords :
Schottky diodes; backscatter; elemental semiconductors; flip-chip devices; hybrid integrated circuits; integrated circuit design; micromachining; millimetre wave integrated circuits; millimetre wave measurement; millimetre wave receivers; radio receivers; radiofrequency identification; silicon; slot antennas; RFID; Si; backscattering based communication; flip chipped diode; frequency 77 GHz; hybrid integrated micromachined receiver; integrated double-folded slot antenna; millimeter wave identification systems; millimeter wave measurements; radio frequency identification; silicon micromachining techniques; Antenna measurements; Fabrication; Millimeter wave communication; Millimeter wave measurements; Millimeter wave technology; Radiofrequency identification; Receivers; Receiving antennas; Semiconductor device measurement; Slot antennas;
Conference_Titel :
Microwave Conference, 2007. European
Conference_Location :
Munich
Print_ISBN :
978-2-87487-001-9
DOI :
10.1109/EUMC.2007.4405373
