• DocumentCode
    2409809
  • Title

    EMMI analysis on silicon solar cell

  • Author

    Yeh, Benjamin ; Huang, Russell ; Chung, Kevin ; Chang, Alan ; Chu, Chih-Hsun

  • Author_Institution
    Mater. Anal. Technol. Inc., Hsinchu
  • fYear
    2008
  • fDate
    7-11 July 2008
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    This work utilized the EMMI as a tool for investigation of the junction leakage of crystalline silicon solar cell under reverse bias and forward bias. The defected areas were examined by the TEM to reveal the physical structure. In addition, analysis of physical structure and component of the solar cell were demonstrated by using common PFA tools, such as OM, SEM, EDX, FIB, and TEM.
  • Keywords
    silicon; solar cells; EDX; EMMI analysis; FIB; OM; PFA tools; SEM; Si; TEM; silicon solar cell; Crystallization; Electroluminescence; Image converters; Photovoltaic cells; Photovoltaic systems; Scanning electron microscopy; Shape; Silicon; Solar power generation; Surface texture;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-2039-1
  • Electronic_ISBN
    978-1-4244-2040-7
  • Type

    conf

  • DOI
    10.1109/IPFA.2008.4588180
  • Filename
    4588180
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2409809