• DocumentCode
    2410049
  • Title

    Au nanocrystal flash memory reliability and failure analysis

  • Author

    Singh, Pawan K. ; Singh, Kaushal K. ; Hofmann, Ralf ; Armstrong, Karl ; Krishna, Nety ; Mahapatra, Souvik

  • Author_Institution
    Dept. of Electr. Eng., IIT Bombay, Mumbai
  • fYear
    2008
  • fDate
    7-11 July 2008
  • Firstpage
    1
  • Lastpage
    5
  • Abstract
    In this work we investigate the memory performance and reliability of Au nanocrystal memory devices. We analyze the Au NC formation process and fabricate actual test wafers for electrical characterization. With reference to good Pt NC devices, poor performance of Au NC devices is investigated in detail by analytical and electrical methods.
  • Keywords
    failure analysis; flash memories; Au; Pt; electrical characterization; failure analysis; nanocrystal flash memory reliability; nanocrystal memory device; test wafer; Aluminum oxide; Annealing; Atherosclerosis; Dielectrics; Fabrication; Failure analysis; Flash memory; Gold; Nanocrystals; Potential well;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physical and Failure Analysis of Integrated Circuits, 2008. IPFA 2008. 15th International Symposium on the
  • Conference_Location
    Singapore
  • Print_ISBN
    978-1-4244-2039-1
  • Electronic_ISBN
    978-1-4244-2040-7
  • Type

    conf

  • DOI
    10.1109/IPFA.2008.4588190
  • Filename
    4588190
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2410049