DocumentCode
2410142
Title
High quality factor micromachined toroid and solenoid inductors
Author
Zine-El-Abidine, Imed ; Okoniewski, Michal
Author_Institution
Univ. of Calgary, Calgary
fYear
2007
fDate
9-12 Oct. 2007
Firstpage
1149
Lastpage
1152
Abstract
High quality toroid and solenoid inductors, exhibiting quality factors as high as 87 at 14.5 GHz and 35 at 6.4 GHz are presented in this paper. The inductors are fabricated using only two plating steps which reduces the complexity of the fabrication. The process lowers the number of ohmic contacts between the electroplated layers improving the performance of the device. The fabrication process is low-temperature and fully compatible with CMOS technology which makes it suitable for post-IC processing.
Keywords
inductors; micromachining; microwave devices; CMOS technology; electroplated layer; frequency 14.5 GHz; frequency 6.4 GHz; high quality factor micromachined toroid inductor; low-temperature fabrication process; post-IC processing; solenoid inductor; two plating steps; CMOS technology; Copper; Dielectric substrates; Etching; Fabrication; Inductors; Q factor; Resists; Silicon; Solenoids; Inductors; micromachining; microwave circuits;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2007. European
Conference_Location
Munich
Print_ISBN
978-2-87487-001-9
Type
conf
DOI
10.1109/EUMC.2007.4405402
Filename
4405402
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