مرکز منطقه ای اطلاع رساني علوم و فناوري - New thin film fabrication technique onto the substrate excited by saw

DocumentCode :

2410946

Title :

New thin film fabrication technique onto the substrate excited by saw

Author :

Takahashi, M. ; Fujita, A. ; Shimatsu, T. ; Wakiyama, T. ; Yamada, J. ; Shiba, T.

fYear :

1990

fDate :

17-20 April 1990

Keywords :

Fabrication; Substrates; Transistors;

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Magnetics Conference, 1990. Digests of INTERMAG '90. International

Conference_Location :

Brighton, UK

Type :

conf

DOI :

10.1109/INTMAG.1990.734089

Filename :

734089

Link To Document :