A compact X-ray lithography lattice using superferric magnets

A conceptual lattice design for a very compact superconducting synchrotron dedicated to X-ray lithography is presented. The synchrotron radiation produced in the high field superconducting magnets has a critical wavelength of 10 Å at a beam energy of about 787 MeV. The size and angular divergence of the beam in this lattice can satisfy the future requirements for X-ray lithography: σ_x,y⩽1 mm and σ_x,y⩽1 mr. An optimization of these two lithography parameters for this lattice configuration is presented. The design philosophy advocated is as follows: (1) simplify the light source dipole magnet design by removing the radial field gradient; (2) select the largest dipole field strengths where ferric magnets can be constructed efficiently; (3) determine the minimal lattice configuration where the optical source properties for lithography can be satisfied; and (4) design a compact intermediate energy injection system to avoid the problems associated with low-energy injection