DocumentCode
2411205
Title
Estimating the resolution of nanopositioning systems from frequency domain data
Author
Fleming, Andrew J.
Author_Institution
Sch. of Electr. Eng. & Comput. Sci., Univ. of Newcastle, Newcastle, NSW, Australia
fYear
2012
fDate
14-18 May 2012
Firstpage
4786
Lastpage
4791
Abstract
Mechanical and electrical noise in nanopositioning systems is unavoidable and dictates the maximum positioning resolution. The proper specification of resolution is critical for defining the smallest possible dimensions in a manufacturing processes or the smallest measurable features in an imaging application. This article defines a standard for the reporting of resolution and demonstrates how this parameter can be measured and predicted from frequency domain data.
Keywords
frequency-domain analysis; manufacturing processes; nanopositioning; noise; electrical noise; frequency domain analysis; manufacturing process; mechanical noise; nanopositioning system; positioning resolution estimation; Approximation methods; Bandwidth; Image resolution; Nanopositioning; Noise; Sensor phenomena and characterization;
fLanguage
English
Publisher
ieee
Conference_Titel
Robotics and Automation (ICRA), 2012 IEEE International Conference on
Conference_Location
Saint Paul, MN
ISSN
1050-4729
Print_ISBN
978-1-4673-1403-9
Electronic_ISBN
1050-4729
Type
conf
DOI
10.1109/ICRA.2012.6224850
Filename
6224850
Link To Document