Title :
An improved technique of impedance measurement for thin film inductors over 10MHz
Author :
Arai, K.I. ; Yamaguchi, M. ; Ohzeki, H.
Author_Institution :
Tohoku Unviersity
Keywords :
Calibration; Capacitance; Dielectric measurements; Electrical resistance measurement; Frequency measurement; Impedance measurement; Length measurement; Measurement techniques; Substrates; Thin film inductors;
Conference_Titel :
Magnetics Conference, 1992. Digests of Intermag '92., International
Conference_Location :
St. Louis, MO, USA
Print_ISBN :
0-7803-0637-6
DOI :
10.1109/INTMAG.1992.696218