Silicon smart microchips for intelligent sensing

Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution imaging was demonstrated.