Silicon smart microchips for intelligent sensing

Author

Ishida, M. ; Kawano, T. ; Takao, H. ; Sawada, K.

Author_Institution

Dept. of Electr. & Electron. Eng., Toyohashi Univ. of Technol., Toyohashi

fYear

2008

fDate

17-19 June 2008

Firstpage

6

Lastpage

9

Abstract

Silicon smart microchips with CMOS/MEMS technology are realized for intelligent sensing. In our developed chips, tow new type sensor chips are presented here. One is Si microprobe electrode array for using in the recording of neurons in the tissue. The probe array can be fabricated on IC chip, using standard IC process followed by a selective Si probe growth. Another one is pH image sensors successfully fabricated by using the CCD/CMOS image sensor technique, and real time imaging of a chemical reaction and pH distribution imaging was demonstrated.

Keywords

CMOS image sensors; chemical sensors; elemental semiconductors; intelligent sensors; microsensors; pH measurement; silicon; CMOS technology; MEMS technology; Si; Si microprobe electrode array; Silicon smart microchips; chemical reaction; pH distribution imaging; pH image sensors; CMOS image sensors; CMOS technology; Charge coupled devices; Electrodes; Image sensors; Intelligent sensors; Micromechanical devices; Neurons; Probes; Silicon;

fLanguage

English

Publisher

ieee

Conference_Titel

VLSI Technology, 2008 Symposium on

Conference_Location

Honolulu, HI

Print_ISBN

978-1-4244-1802-2

Electronic_ISBN

978-1-4244-1803-9

Type

conf

DOI

10.1109/VLSIT.2008.4588543

Filename

4588543