Title :
The mathematical models for determination of spatial transformation coefficients of complicated configuration probes
Author :
Grishenko, V.L. ; Matveeva, I.A.
Author_Institution :
Scientific-Research Institute of Mechanic and Physics, Chernyshevski Saratov State University, Russia
Abstract :
Probes of complicated configuration are used for noncontact measurement of potential and charge surface distributions. The resolution and the sensitivity of such probe system are depended on spatial transformation coefficients for charge or potential and impedance of measuring circuit. The based-model method for determination of spatial transformation coefficients is described. The received expressions for planar-parallel and axis-symmetrical probe systems are considered.
Keywords :
charge measurement; probes; surface potential; voltage measurement; axisymmetrical probe; circuit impedance; mathematical model; noncontact measurement; planar-parallel probe; spatial transformation coefficients; surface charge distribution; surface potential; Charge measurement; Circuits; Current measurement; Impedance measurement; Mathematical model; Probes; Spatial resolution; Surface impedance;
Conference_Titel :
Actual Problems of Electron Devices Engineering, 2002. (APEDE 2002). Fifth International Conference on
Conference_Location :
Saratova, Russia
Print_ISBN :
5-7433-1065-3
DOI :
10.1109/APEDE.2002.1044944
