DocumentCode
2413388
Title
The mathematical models for determination of spatial transformation coefficients of complicated configuration probes
Author
Grishenko, V.L. ; Matveeva, I.A.
Author_Institution
Scientific-Research Institute of Mechanic and Physics, Chernyshevski Saratov State University, Russia
fYear
2002
fDate
18-19 Sept. 2002
Firstpage
276
Lastpage
282
Abstract
Probes of complicated configuration are used for noncontact measurement of potential and charge surface distributions. The resolution and the sensitivity of such probe system are depended on spatial transformation coefficients for charge or potential and impedance of measuring circuit. The based-model method for determination of spatial transformation coefficients is described. The received expressions for planar-parallel and axis-symmetrical probe systems are considered.
Keywords
charge measurement; probes; surface potential; voltage measurement; axisymmetrical probe; circuit impedance; mathematical model; noncontact measurement; planar-parallel probe; spatial transformation coefficients; surface charge distribution; surface potential; Charge measurement; Circuits; Current measurement; Impedance measurement; Mathematical model; Probes; Spatial resolution; Surface impedance;
fLanguage
English
Publisher
ieee
Conference_Titel
Actual Problems of Electron Devices Engineering, 2002. (APEDE 2002). Fifth International Conference on
Conference_Location
Saratova, Russia
Print_ISBN
5-7433-1065-3
Type
conf
DOI
10.1109/APEDE.2002.1044944
Filename
1044944
Link To Document