Multi-functional Monolithic-MEMS Tactile Imager Using Flexible Deformation of Silicon IC

In this paper, a novel concept of multi-functional MEMS tactile imager using flexible deformation of silicon IC for advanced tactile sensing applications is presented. Integration design of multi-functional tactile imager with sensing abilities of contact-force, hardness and temperature distributions is totally discussed based on their measured performances. This tactile sensor has a sensing region of silicon diaphragm on which two-dimensional (2-D) sensor array and circuits are integrated. Signal processing circuitry for the sensing array is also integrated around the diaphragm. The sensing diaphragm is pneumatically swollen by an air-pressure to obtain a soft and flexible surface of tactile sensor. Contact force distribution of touching object can be detected from stress distribution on the deformed diaphragm. Also, hardness distribution can be detected by ´amplitude-modulation´ of the diaphragm vibration. Surface temperature distribution is measured using temperature sensor array integrated on the same diaphragm. Finally, total device design of multi-functional monolithic tactile imager is discussed considering robustness of sensor structure under practical use.