Title :
A 0.18 μm CMOS Capacitive Detection Lab-on-Chip
Author :
Ghafar-Zadeh, Ebrahim ; Sawan, Mohamad
Author_Institution :
Ecole Polytech. de Montreal, Montreal
Abstract :
In this paper, we put forward a CMOS-based capacitive interface circuit for lab-on-chip applications. This simple capacitive detector is implemented in the TSMC 0.18 CMOS process to which we incorporate microfluidic channels. In addition, we address the often-neglected challenges of microfluidic packaging for integrated biochemical sensors by proposing an efficient direct-write microfluidic packaging procedure. The simulation, fabrication and preliminary measurement results are also presented and discussed.
Keywords :
CMOS integrated circuits; biochemistry; chemical sensors; microfluidics; TSMC CMOS process; capacitive detector; capacitive interface circuit; direct-write microfluidic packaging; integrated biochemical sensors; lab-on-chip; microfluidic channels; size 0.18 μm; Biosensors; CMOS technology; Capacitance; Capacitive sensors; Chemical analysis; Circuits; Lab-on-a-chip; Microfluidics; Packaging; Sensor arrays;
Conference_Titel :
Custom Integrated Circuits Conference, 2007. CICC '07. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-0786-6
Electronic_ISBN :
978-1-4244-1623-3
DOI :
10.1109/CICC.2007.4405705
