Using IS modeling to understand the effect of growth conditions and film attributes on AC conduction in CVD diamond

The correlation between the electrical properties, especially conductivity, and film attributes of a wide selection of polycrystalline CVD diamond is investigated using the impedance spectroscopy (IS) modeling technique. Four key film properties, namely (1) the Raman diamond to graphite ratio (Id/Ig), (2) the full-width-at-half-maximum (FWHM) of the diamond Raman signal, (3) the crystalline morphology as quantified by the growth parameter, a, and (4) the average grain size have been considered and related to the films´ conductivities. The electrical properties are also correlated to two deposition parameters, namely substrate temperature and gas flow rate. The effect of test temperature on as-grown and annealed films´ electrical behavior is also considered