Title :
Temperature Sensor Design in a High Volume Manufacturing 65nm CMOS Digital Process
Author :
Duarte, David E. ; Geannopoulos, George ; Mughal, Usman ; Wong, Keng L. ; Taylor, Greg
Author_Institution :
Intel Corp., Hillsboro
Abstract :
Thermal management (TM) allows the system architect to design a cooling solution based on real-life power consumption, not peak power. The on-die thermal sensor circuit, as the core of the TM system, monitors the on-die junction temperature (Tj). We present a novel high-linearity thermal sensor topology with built-in circuit support for correction of systematic shifts in the transfer function correction. Results obtained on the 65 nm Pentiumreg4 processor demonstrate the feasibility and effectiveness of the design.
Keywords :
CMOS integrated circuits; microprocessor chips; temperature sensors; thermal management (packaging); transfer functions; CMOS digital process; high-linearity thermal sensor topology; on-die junction temperature; on-die thermal sensor circuit; size 65 nm; temperature sensor design; thermal management; transfer function correction; CMOS process; Circuits; Cooling; Energy management; Manufacturing processes; Power system management; Sensor systems; Temperature sensors; Thermal management; Thermal sensors;
Conference_Titel :
Custom Integrated Circuits Conference, 2007. CICC '07. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-1623-3
Electronic_ISBN :
978-1-4244-1623-3
DOI :
10.1109/CICC.2007.4405718