Title :
Architecture of Via Programmable Logic using Exclusive-OR Array (VPEX) for EB Direct Writing
Author :
Akihiro, Nakamura ; Kawaharazaki, Masahide ; Yoshikawa, Masaya ; Fujino, Takeshi
Author_Institution :
Ritsumeikan Univ., Shiga
Abstract :
In this paper, we propose the novel architecture of VCLD (via configurable logic device) called VPEX (via programmable logic using exclusive-OR array) which is optimized for electron beam (EB) direct writing. The logic element (LE) of VPEX consists of complex gate type exclusive OR (EXOR) and inverter (NOT) gates. The single LE can output 12 logics which include all 2-inputs logic functions (NAND, NOR AND, OR bubble AND, bubble OR XOR XNOR), 3 inputs AOI21 and inverted-output multiplexer (MUXI) by changing via-1 layout. Scan D-FlipFlop can be composed by using 5 LEs. The logic of each LE can be defined by double EB exposure using "character beam". The speed performance of VPEX is much better than that of FPGAs, and 1.5 times worse than that of ASICs. We believe that the combination of VPEX architecture and EB direct writing is the best solution for low-volume production LSIs.
Keywords :
application specific integrated circuits; electron beam lithography; field programmable gate arrays; large scale integration; logic design; programmable logic devices; ASIC; FPGA; LSI; NOT gate; electron beam direct writing; exclusive-OR array; inverted-output multiplexer; inverter; logic element; scan D-flip flop; via configurable logic device; Application specific integrated circuits; Costs; Field programmable gate arrays; Logic design; Logic devices; Logic functions; Logic programming; Production; Programmable logic arrays; Writing; electron-beam direct writing; exclusive OR; look-up table; low volume production; structured ASIC; via-configurable logic; via-programmable logic;
Conference_Titel :
Custom Integrated Circuits Conference, 2007. CICC '07. IEEE
Conference_Location :
San Jose, CA
Print_ISBN :
978-1-4244-1623-3
Electronic_ISBN :
978-1-4244-1623-3
DOI :
10.1109/CICC.2007.4405728
