Title :
A comparative study of CoZrNb and NiFe targets in discharge and sputtering using plasma confining type of magnetron sputtering method
Author :
Takahashi, T. ; Naoe, M.
Author_Institution :
Toyama University
Keywords :
Magnetic confinement; Plasma confinement; Sputtering;
Conference_Titel :
Magnetics Conference, 1990. Digests of INTERMAG '90. International
Conference_Location :
Brighton, UK
DOI :
10.1109/INTMAG.1990.734256
