Soft Magnetic Properties of Fe-N and Fe-Si-N Thin Films Sputtered in (Ar+N/sub 2/) Plasma

Author

Takahashi, M. ; Shoji, H. ; Shimatsu, T. ; Komaba, H. ; Wakiyama, T.

fYear

1990

fDate

17-20 April 1990

Keywords

Magnetic films; Magnetic properties; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Magnetics Conference, 1990. Digests of INTERMAG '90. International

Conference_Location

Brighton, UK

Type

DOI

10.1109/INTMAG.1990.734264

Filename

734264

Link To Document