Title :
Soft Magnetic Properties of Fe-N and Fe-Si-N Thin Films Sputtered in (Ar+N/sub 2/) Plasma
Author :
Takahashi, M. ; Shoji, H. ; Shimatsu, T. ; Komaba, H. ; Wakiyama, T.
Keywords :
Magnetic films; Magnetic properties; Sputtering;
Conference_Titel :
Magnetics Conference, 1990. Digests of INTERMAG '90. International
Conference_Location :
Brighton, UK
DOI :
10.1109/INTMAG.1990.734264
