CMOS-Based MEMS Mirror Driver for Maskless Lithography Systems

This paper presents a low-power MEMS mirror driver for maskless lithography systems. The CMOS driver consists of a 512 x 128 analog memory cell array to drive the position of 512 x 128 MEMS mirror array. The row driver employs an analog de-multiplexing architecture, which eliminates the need for precise matching among multiple row driver characteristics. It uses two parallel high-speed 8-b DACs with 128 sample-and-hold amplifiers (SHAs) to write a multilevel data into memory cells. To verify its functionality, a prototype test chip is implemented with a self-calibration technique to compensate the cell leakage. The driver chip is implemented in a 0.35-mum digital CMOS process. It consumes a 120 mA power with 3/3.6 V supplies.