Title : 
III–V-IV integration toward electronics and photonics convergence on a silicon platform
         
        
            Author : 
Kei May Lau ; Qiang Li
         
        
            Author_Institution : 
Dept. of Electron. & Comput. Eng., Hong Kong Univ. of Sci. & Technol., Kowloon, China
         
        
        
        
        
        
            Abstract : 
Integration of III-V compound semiconductor devices on a Si manufacturing platform represents one of the most topical challenges today. Potentially, such heterogeneous integration can offer numerous opportunities in combining the unique electronic and photonic functionalities of III-V technology with the large volume, low cost and high density Si CMOS technology. Here we review the major challenges and our recent progress in monolithic integration of III-V materials on Si by direct epitaxy and its device applications. Several importance techniques to achieve high crystalline quality III-V semiconductors on Si are presented and their distinct advantages and limitations are discussed.
         
        
            Keywords : 
CMOS integrated circuits; III-V semiconductors; elemental semiconductors; epitaxial growth; integrated optoelectronics; silicon; III-V compound semiconductor device; III-V-IV integration; Si; direct epitaxy; electronic functionality; heterogeneous integration; high density CMOS technology; monolithic integration; photonic functionality; silicon manufacturing platform; Abstracts; Annealing; Gallium arsenide; Indium phosphide; Silicon; Substrates;
         
        
        
        
            Conference_Titel : 
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
         
        
            Conference_Location : 
Guilin
         
        
            Print_ISBN : 
978-1-4799-3296-2
         
        
        
            DOI : 
10.1109/ICSICT.2014.7021190