A nine-position, electrostatic micro-stage

This paper presents a design and simulation results for a nine-position micro-stage that can be utilized, for example, as a multi-position mirror, a wobble motor, or a multi-throw switch. Micro-electro-mechanical systems (MEMS) technology has been chosen for the design to provide the small size and low cost required for the above applications. To reduce prototyping costs, the proposed design is for a standardized three-layer polysilicon process. Computer aided design and finite element tools were used to validate and optimize the design. The micro-stage consists of a fully released stage structure surrounded by a retaining ring. Short, overhung cantilevers limit motions normal to the stage and provide actuation. Our design provides an actuation voltage of below 3 volts while maintaining deflection angles in the range of 2 to 4 degrees