Title :
A low-noise SC-type interface asic for a closed-loop MEMS gyroscope
Author :
Mingxing Liu ; Wengao Lu ; Tingting Tao ; Hai Chu ; Xiaoliang Li ; Zhongjian Chen ; Yacong Zhang ; Guizhen Yan
Author_Institution :
Dept. of Microelectron., Peking Univ., Beijing, China
Abstract :
This paper presents a low-noise SC-type interface ASIC for a closed-loop MEMS vibratory gyroscope. An AC sensing method is employed to convert the amplitude-modulated capacitive signal to voltage signal. The interface CSA (charge sensitive amplifier) is followed by a CDS (correlated double sampling) circuit to reduce low frequency noise and eliminate offset. The system realizes a closed-loop control in the driving and sensing mode. The ASIC is fabricated in 0.18um CMOS process and occupies 2.9×1.7 mm2.
Keywords :
CMOS integrated circuits; amplifiers; analogue-digital conversion; application specific integrated circuits; closed loop systems; gyroscopes; microsensors; vibration measurement; AC sensing method; CDS; CMOS process; amplitude-modulated capacitive signal; charge sensitive amplifier; closed-loop MEMS vibratory gyroscope; closed-loop control; correlated double sampling circuit; low frequency noise reduction; low-noise SC-type interface ASIC; offset elimination; size 0.18 mum; voltage signal; Abstracts; Equations; Gyroscopes; Switches;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021221
