A novel electrostatic vibration energy harvester array using sidewall electric field

Author

Ling Bu ; Huiyong Xu ; Bingji Xu

Author_Institution

Sch. of Inf. Eng., China Univ. of Geosci., Beijing, China

fYear

2014

fDate

28-31 Oct. 2014

Firstpage

1

Lastpage

3

Abstract

This paper presents a novel electrostatic vibration energy harvester array for micron or sub-micron scale integration. Unlike traditional electrostatic harvesters which adopt planar plate capacitor structure, this work utilizes sidewall electric field for induction, and thus device dimension can be reduced to micron or sub-micron scale. The proposed harvester array is simulated and optimized. For 1mm² area of array (optimal unit electrode size 6.5μm×6.5μm), generated current reaches 0.82μA @10μm, 20Hz sinusoidal vibration. Maximally, 6.45μW output power is obtained on 10MΩ load resistance.

Keywords

electric fields; electrostatic devices; energy harvesting; vibrations; current 0.82 muA; electrostatic vibration energy harvester array; load resistance; planar plate capacitor structure; power 6.45 muW; resistance 10 ohm; sidewall electric field; sinusoidal vibration; submicron scale integration; Abstracts; Educational institutions; Electrets; Electrodes; Stators; Substrates; Vibrations;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on

Conference_Location

Guilin

Print_ISBN

978-1-4799-3296-2

Type

conf

DOI

10.1109/ICSICT.2014.7021222

Filename

7021222