Title :
A novel electrostatic vibration energy harvester array using sidewall electric field
Author :
Ling Bu ; Huiyong Xu ; Bingji Xu
Author_Institution :
Sch. of Inf. Eng., China Univ. of Geosci., Beijing, China
Abstract :
This paper presents a novel electrostatic vibration energy harvester array for micron or sub-micron scale integration. Unlike traditional electrostatic harvesters which adopt planar plate capacitor structure, this work utilizes sidewall electric field for induction, and thus device dimension can be reduced to micron or sub-micron scale. The proposed harvester array is simulated and optimized. For 1mm2 area of array (optimal unit electrode size 6.5μm×6.5μm), generated current reaches 0.82μA @10μm, 20Hz sinusoidal vibration. Maximally, 6.45μW output power is obtained on 10MΩ load resistance.
Keywords :
electric fields; electrostatic devices; energy harvesting; vibrations; current 0.82 muA; electrostatic vibration energy harvester array; load resistance; planar plate capacitor structure; power 6.45 muW; resistance 10 ohm; sidewall electric field; sinusoidal vibration; submicron scale integration; Abstracts; Educational institutions; Electrets; Electrodes; Stators; Substrates; Vibrations;
Conference_Titel :
Solid-State and Integrated Circuit Technology (ICSICT), 2014 12th IEEE International Conference on
Conference_Location :
Guilin
Print_ISBN :
978-1-4799-3296-2
DOI :
10.1109/ICSICT.2014.7021222
