Fabrication of Topographical Ridge Guides on Silicon for VHF Operation

Author

Rosenfeld, R.C. ; Bean, K.E.

fYear

1972

fDate

1972

Firstpage

186

Lastpage

189

Keywords

Acoustic devices; Acoustic waves; Crystallography; Delay effects; Doping; Etching; Fabrication; Frequency; Silicon; Surface topography;

fLanguage

English

Publisher

ieee

Conference_Titel

1972 Ultrasonics Symposium

Type

DOI

10.1109/ULTSYM.1972.196059

Filename

1532999

Link To Document