Title :
Fabrication of Topographical Ridge Guides on Silicon for VHF Operation
Author :
Rosenfeld, R.C. ; Bean, K.E.
Keywords :
Acoustic devices; Acoustic waves; Crystallography; Delay effects; Doping; Etching; Fabrication; Frequency; Silicon; Surface topography;
Conference_Titel :
1972 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1972.196059
