DocumentCode
2416597
Title
The Effect of Ion Beam Sputtering on Acoustic Surface Wave Propagation
Author
Garvin, Hugh L. ; Weglein, Rolf D.
fYear
1972
fDate
1972
Firstpage
190
Lastpage
193
Keywords
Acoustic propagation; Argon; Attenuation; Delay lines; Electrodes; Ion beams; Propagation losses; Sputtering; Surface acoustic wave devices; Surface acoustic waves;
fLanguage
English
Publisher
ieee
Conference_Titel
1972 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1972.196060
Filename
1533000
Link To Document