Title :
The Effect of Ion Beam Sputtering on Acoustic Surface Wave Propagation
Author :
Garvin, Hugh L. ; Weglein, Rolf D.
Keywords :
Acoustic propagation; Argon; Attenuation; Delay lines; Electrodes; Ion beams; Propagation losses; Sputtering; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
1972 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1972.196060
