Title :
Ion Beam Etching of Reflective Array Filters
Author :
Smith, Henry I. ; Williamson, R.C. ; Brogan, W.T.
Keywords :
Electrodes; Electrons; Filters; Gratings; Ion beams; Laboratories; Optical reflection; Resists; Sputter etching; Sputtering;
Conference_Titel :
1972 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1972.196062
