Title :
A Comparison Between the Physical Structure of Sputtered Zinc Oxide Films and the Measured Electromechanical Coupling Factor for Surface Acoustic Waves Generated by Such Films
Author :
Bahr, A.J. ; Lee, R.E. ; Hickernell, P.S. ; Willingham, C.B. ; Reeder, T.M.
Keywords :
Acoustic measurements; Acoustic waves; Crystallization; Diodes; Electrons; Optical films; Radio frequency; Sputtering; Surface acoustic waves; Zinc oxide;
Conference_Titel :
1972 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1972.196063
