DocumentCode
2416641
Title
A Comparison Between the Physical Structure of Sputtered Zinc Oxide Films and the Measured Electromechanical Coupling Factor for Surface Acoustic Waves Generated by Such Films
Author
Bahr, A.J. ; Lee, R.E. ; Hickernell, P.S. ; Willingham, C.B. ; Reeder, T.M.
fYear
1972
fDate
1972
Firstpage
202
Lastpage
205
Keywords
Acoustic measurements; Acoustic waves; Crystallization; Diodes; Electrons; Optical films; Radio frequency; Sputtering; Surface acoustic waves; Zinc oxide;
fLanguage
English
Publisher
ieee
Conference_Titel
1972 Ultrasonics Symposium
Type
conf
DOI
10.1109/ULTSYM.1972.196063
Filename
1533003
Link To Document