DocumentCode :
2416662
Title :
Improving track density by lithography
Author :
Gau, J.S.
fYear :
1990
fDate :
17-20 April 1990
Keywords :
Lithography;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Magnetics Conference, 1990. Digests of INTERMAG '90. International
Conference_Location :
Brighton, UK
Type :
conf
DOI :
10.1109/INTMAG.1990.734374
Filename :
734374
Link To Document :
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