Automated Extraction of Model Parameters for Noise Coupling Analysis in Silicon Substrates

An automated process, requiring the fabrication of only a few simple test structures, can efficiently characterize a silicon substrate by extracting the process constants of a Z-parameter based macromodel. The resulting model is used to generate a resistive substrate network that can be used in noise coupling simulations. This process has been integrated into the Cadence DFII environment to provide a seamless substrate noise simulation package which alleviates the need for pre-characterized libraries.