Title :
100 MHz MOSFET Detection of Rayleigh Surface Waves
Keywords :
Conductivity; Frequency; MOSFET circuits; Piezoresistance; Silicon; Stress; Substrates; Surface resistance; Surface waves; Transducers;
Conference_Titel :
1972 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1972.196070
