Title :
Strip Coupled AlN and Si on Sapphire Convolvers
Keywords :
Acoustic waves; Convolvers; Optical coupling; Piezoelectric films; Semiconductor films; Silicon; Strips; Substrates; Surface acoustic wave devices; Surface acoustic waves;
Conference_Titel :
1973 Ultrasonics Symposium
DOI :
10.1109/ULTSYM.1973.196169