Title :
Meniscus Pinned Variable-focus Liquid Lens Based on Electrowetting-on-dielectric
Author :
Kang, Ming ; Yue, Ruifeng ; Wu, Jiangang ; Ouyang, Fan ; Liu, Litian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ.
Abstract :
A novel configuration of variable-focus liquid lens based on electrowetting-on-dielectric technique is presented, which consists of a glass slide growing a conductive indium tin oxide (ITO) film and a hydrophobic dielectric film, a hollow conical metal ring suspended right above, a gap between the slide and the ring, and the lens liquid (water). By changing the voltage applied to grounded metal ring and the ITO control electrode, both the position and curvature of the liquid meniscus can be reversibly adjusted, thus tuning the focal length of the lens. The experimental results show that at a 40 V power supply, the liquid lens is able to focus on objects from 2.5 centimeters up to infinity away with a good imaging quality.
Keywords :
microlenses; wetting; 40 V; conductive indium tin oxide film; control electrode; electrowetting-on-dielectric; grounded metal ring; hollow conical metal ring; hydrophobic dielectric film; meniscus pinned variable-focus liquid lens; surface tension; Conductive films; Dielectric films; Electrodes; Glass; High speed optical techniques; Indium tin oxide; Lenses; Optical films; Optical variables control; Voltage; Electrowetting on dielectric; Liquid lens; Surface tension; Variable focus;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2007. NEMS '07. 2nd IEEE International Conference on
Conference_Location :
Bangkok
Print_ISBN :
1-4244-0610-2
DOI :
10.1109/NEMS.2007.352035