Micro Fluidic System by Integrating Pressure Sensor Arrays with a Micro-Channel

This fabrication process developed in the current paper is almost the reverse of the surface micromachining process usually used for the microchannel system. This allows the use of SU-8 to fabricate, by lithography, the diaphragm and the cavities used for these pressure sensors, and the channel. The fabrication process has many advantages over others, such as completely absence of diaphragm stiction, allowing much wider measurement range and flow conditions. More detailed design and fabrication techniques developed, and the calibration of sensors for this channel system is presented. The pressure distributions measured along the channel are compared with the analysis.